Product Overview
Thin Film Thickness Monitor Crystals
Thin film thickness monitor crystals are sensors used in vacuum deposition to detect thickness of deposited films. We design and manufacture our monitor crystals with advanced technical knowledge. Allowing us to provide sensors with reduced fluctuations. We also accept requests to recycle your monitor crystals and get back to you with feedbacks later.
Thin Film Thickness Monitor Crystals
6MHz
| Specifications | 6A100W,6A121P | 6D100W |
|---|---|---|
| Dimensions | Φ14 | Φ14 |
| Electrode Material | Au | Al-allow |
| Central Frequency | 5,985kHz | 5,985kHz |
| Frequency Tolerance | ±5.0kHz | ±5.0kHz |
| Series Resistance | 15Ωmax | 15Ωmax |
| Operating Temperature | 25~120℃ | 25~120℃ |
| Frequency Temperature Characteristics | ±50ppm | ±50ppm |
Thin Film Thickness Monitor Crystals
5MHz
| Specifications | 5A500,5A510,5A511 | 5B500,5B511 | 5D500,5D510 |
|---|---|---|---|
| Dimensions | Φ12.5 | Φ12.5 | Φ12.5 |
| Electrode Material | Au | Ag | Al-alloy |
| Central Frequency | 5,000kHz | 5,000kHz | 5,000kHz |
| Frequency Tolerance | ±5.0kHz | ±5.0kHz | ±5.0kHz |
| Series Resistance | 15Ωmax | 15Ωmax | 15Ωmax |
| Operating Temperature | 25~120℃ | 25~120℃ | 25~120℃ |
| Frequency Temperature Characteristics | ±50ppm | ±50ppm | ±50ppm |