Product Overview

Thin Film Thickness Monitor Crystals

Thin film thickness monitor crystals are sensors used in vacuum deposition to detect thickness of deposited films. We design and manufacture our monitor crystals with advanced technical knowledge. Allowing us to provide sensors with reduced fluctuations. We also accept requests to recycle your monitor crystals and get back to you with feedbacks later.

Thin Film Thickness Monitor Crystals

6MHz

Specifications6A100W,6A121P6D100W
DimensionsΦ14Φ14
Electrode MaterialAuAl-allow
Central Frequency5,985kHz5,985kHz
Frequency Tolerance±5.0kHz±5.0kHz
Series Resistance15Ωmax15Ωmax
Operating Temperature25~120℃25~120℃
Frequency Temperature Characteristics±50ppm±50ppm
Thin Film Thickness Monitor Crystals

5MHz

Specifications5A500,5A510,5A5115B500,5B5115D500,5D510
DimensionsΦ12.5Φ12.5Φ12.5
Electrode MaterialAuAgAl-alloy
Central Frequency5,000kHz5,000kHz5,000kHz
Frequency Tolerance±5.0kHz±5.0kHz±5.0kHz
Series Resistance15Ωmax15Ωmax15Ωmax
Operating Temperature25~120℃25~120℃25~120℃
Frequency Temperature Characteristics±50ppm±50ppm±50ppm
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